Micro-hardness, microstructures and thermal stability of (Ti,Cr,Al,Si)N films deposited by cathodic arc method

Chemical Compounds

• Alloy 8%
• Annealing 28%
• Arc Method 100%
• Cathode 8%
• Crystal Structure 12%
• Cubic Space Group 49%
• Electron Microscopy 10%
• Hexagonal Space Group 18%
• Liquid Film 29%
• Microhardness 65%
• Microstructure 40%
• Mixture 5%
• Thermal Stability 39%
• Vacuum 9%
• X-Ray Diffraction 5%

Engineering & Materials Science

• Annealing 44%
• Cathodes 14%
• Crystal structure 38%
• Electron microscopy 19%
• Hardness 11%
• Microhardness 60%
• Microstructure 40%
• Sodium chloride 31%
• Temperature 6%
• Thermodynamic stability 62%
• Vacuum furnaces 22%
• X ray diffraction 14%

Physics & Astronomy

• annealing 27%
• arcs 50%
• cathodes 12%
• crystal structure 23%
• diffraction 8%
• electron microscopy 12%
• hardness 11%
• indication 13%
• microhardness 56%
• microstructure 35%
• thermal stability 52%
• vacuum furnaces 20%
• wurtzite 14%
• x rays 6%