Microhardness and lattice parameter of Cr1-xAlxN films

Masahiro Kawate; Ayako Kimura; Tetsuya Suzuki

doi:10.1116/1.1448510

Microhardness and lattice parameter of Cr_1-xAl_xN films

Masahiro Kawate, Ayako Kimura, Tetsuya Suzuki

機械工学科

研究成果: Article › 査読

108 被引用数 (Scopus)

抄録

Eight kinds of targets with differing Al contents were used to synthesize Cr_1-xAl_xN films by the arc ion plating (AIP) method. Investigation of microhardness, microstructures, and lattice parameters of films was done by changing x values and analyzed by x-ray diffraction (XRD) method and scanning electron microscopy (SEM). Cross-sectional SEM observation of films showed that for all Cr_1-xAl_xN films, deposited for 20 min, microstructure drastically changed between x = 0.6 and 0.7, and had similar thickness of 5 to 6 μm.

本文言語	English
ページ（範囲）	569-571
ページ数	3
ジャーナル	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
巻	20
号	2
DOI	https://doi.org/10.1116/1.1448510
出版ステータス	Published - 2002 3月

ASJC Scopus subject areas

凝縮系物理学
表面および界面
表面、皮膜および薄膜

文献へのアクセス

10.1116/1.1448510

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引用スタイル

@article{4c5f1895233c4ab0839e0262a65ce212,

title = "Microhardness and lattice parameter of Cr1-xAlxN films",

abstract = "Eight kinds of targets with differing Al contents were used to synthesize Cr1-xAlxN films by the arc ion plating (AIP) method. Investigation of microhardness, microstructures, and lattice parameters of films was done by changing x values and analyzed by x-ray diffraction (XRD) method and scanning electron microscopy (SEM). Cross-sectional SEM observation of films showed that for all Cr1-xAlxN films, deposited for 20 min, microstructure drastically changed between x = 0.6 and 0.7, and had similar thickness of 5 to 6 μm.",

author = "Masahiro Kawate and Ayako Kimura and Tetsuya Suzuki",

year = "2002",

month = mar,

doi = "10.1116/1.1448510",

language = "English",

volume = "20",

pages = "569--571",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Microhardness and lattice parameter of Cr1-xAlxN films

AU - Kawate, Masahiro

AU - Kimura, Ayako

AU - Suzuki, Tetsuya

PY - 2002/3

Y1 - 2002/3

N2 - Eight kinds of targets with differing Al contents were used to synthesize Cr1-xAlxN films by the arc ion plating (AIP) method. Investigation of microhardness, microstructures, and lattice parameters of films was done by changing x values and analyzed by x-ray diffraction (XRD) method and scanning electron microscopy (SEM). Cross-sectional SEM observation of films showed that for all Cr1-xAlxN films, deposited for 20 min, microstructure drastically changed between x = 0.6 and 0.7, and had similar thickness of 5 to 6 μm.

AB - Eight kinds of targets with differing Al contents were used to synthesize Cr1-xAlxN films by the arc ion plating (AIP) method. Investigation of microhardness, microstructures, and lattice parameters of films was done by changing x values and analyzed by x-ray diffraction (XRD) method and scanning electron microscopy (SEM). Cross-sectional SEM observation of films showed that for all Cr1-xAlxN films, deposited for 20 min, microstructure drastically changed between x = 0.6 and 0.7, and had similar thickness of 5 to 6 μm.

UR - http://www.scopus.com/inward/record.url?scp=0036494572&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036494572&partnerID=8YFLogxK

U2 - 10.1116/1.1448510

DO - 10.1116/1.1448510

M3 - Article

AN - SCOPUS:0036494572

VL - 20

SP - 569

EP - 571

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 2

ER -