Microhardness and structural analysis of (Ti,Al)N, (Ti,Cr)N, (Ti,Zr)N and (Ti,V)N films

Hiroyuki Hasegawa, Ayako Kimura, Tetsuya Suzuki

研究成果: Article査読

75 被引用数 (Scopus)

抄録

Binary (TiN, ZrN, CrN) and ternary (TiAlN, TiCrN, TiZrN, TiVN) films were prepared on cemented carbide by arc ion plating. The microhardness, lattice parameter and morphology of the films were examined by micro-Vickers testing, X-ray diffraction analysis, and cross-sectional scanning electron microscopy. Results showed that binary nitride films generally had smaller Vickers hardness than ternary nitride. The lattice parameter of the first two ternary nitrides were smaller than that of TiN, while that of the third ternary nitride was larger than that of TiN and smaller than that of ZrN. All but the TiCrN and TiVN films had smooth surfaces.

本文言語English
ページ(範囲)1038-1040
ページ数3
ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
18
3
DOI
出版ステータスPublished - 2000 5 1

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜

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