Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction

Yuko Morofushi, Hajime Matsushita, Norihisa Miki

研究成果: Conference contribution

抄録

Single crystal diamond is expected to be a new material for not only micro machining tools but also innovative micro devices. In this paper, we demonstrate the micro-patterning of bulk diamond by exploiting thermochemical reaction between diamond and sidero-metals. We demonstrate micro-patterning of single crystal diamond by annealing at ∼1073 K after either micro-patterning nickel on the diamond or placing the diamond on a silicon substrate with a micro-patterned nickel layer. Etching rates ∼0.2μm/min were successfully achieved. We also experimentally elucidated the etching mechanisms and identified the dominant factors in the etching processes.

本文言語English
ホスト出版物のタイトルMicroelectromechanical Systems - Materials and Devices III
ページ179-184
ページ数6
出版ステータスPublished - 2010 8 30
イベント2009 MRS Fall Meeting - Boston, MA, United States
継続期間: 2009 11 302009 12 4

出版物シリーズ

名前Materials Research Society Symposium Proceedings
1222
ISSN(印刷版)0272-9172

Other

Other2009 MRS Fall Meeting
国/地域United States
CityBoston, MA
Period09/11/3009/12/4

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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