Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction

Engineering & Materials Science

• Annealing 14%
• Diamonds 86%
• Etching 46%
• Machining 11%
• Metals 55%
• Nickel 26%
• Silicon 11%
• Single crystals 100%
• Substrates 10%

Physics & Astronomy

• annealing 8%
• diamonds 69%
• etching 32%
• machining 15%
• metals 44%
• microbalances 87%
• nickel 23%
• silicon 7%
• single crystals 53%

Chemical Compounds

• Annealing 11%
• Diamond 82%
• Etching 39%
• Machining 18%
• Single Crystalline Solid 61%