Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever

Masaaki Oshita, Hidetoshi Takahashi, Tetsuo Kan

研究成果: Conference contribution

抄録

This paper reports on a miniaturization method of near-infrared spectrometer based on a plasmonic near-infrared photodetector. The spectrometer has an n-typed Si cantilever with an Au diffraction grating for Surface Plasmon Resonance (SPR) generation. Mechanical vibration of the cantilever provides alternation of the angle of incidence of the light to be measured. Coupled to SPR, the light energy is transduced to photocurrent. Since the different incident angle corresponds to different SPR resonant wavelength, the electrical measurement data of photocurrent during the cantilever vibration provides the whole spectrum information of the incident light. In this time, we developed a spectrometer device and measured time varying series of photocurrent during the cantilever vibration. Waveforms of the series were clearly dependent on the incident wavelength, and coherent to the SPR theory.

本文言語English
ホスト出版物のタイトル2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
出版社Institute of Electrical and Electronics Engineers Inc.
ページ688-691
ページ数4
ISBN(電子版)9781538647820
DOI
出版ステータスPublished - 2018 4 24
外部発表はい
イベント31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
継続期間: 2018 1 212018 1 25

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2018-January
ISSN(印刷版)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

フィンガープリント 「Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル