抄録
A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 1742-1744 |
| ページ数 | 3 |
| ジャーナル | Applied Physics Letters |
| 巻 | 54 |
| 号 | 18 |
| DOI | |
| 出版ステータス | Published - 1989 |
ASJC Scopus subject areas
- 物理学および天文学（その他）