Modeling of a rf glow discharge plasma

Katsuji Okazaki, Toshiaki Makabe, Yukio Yamaguchi

研究成果: Article査読

69 被引用数 (Scopus)

抄録

A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.

本文言語English
ページ(範囲)1742-1744
ページ数3
ジャーナルApplied Physics Letters
54
18
DOI
出版ステータスPublished - 1989

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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