Modeling of gas flow in the simulation of H"SUP -" ion source

M. Ogasawara, Y. Okuda, M. Shirai, S. Mitsuhashi, A. Hatayama

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A model of actual gas supply into the ion source is presented. Filling pressure is related to gas flow and conductance of the H"SUP -" extraction system. The rate equation for the H"SUB 2" molecule simulation of a negative outflow rates related with the filling pressure are employed in the numerical simulation of a negative hydrogen in source. With the results of numerical simulation, the H number conservation relation and pressure balance equation are shown to be inaccurate especially for higher electron temperture. (after Authors)

本文言語English
ページ(範囲)1082-1084
ページ数3
ジャーナルReview of Scientific Instruments
67
3
DOI
出版ステータスPublished - 1996 1月 1

ASJC Scopus subject areas

  • 器械工学

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