Modeling of physical etching based on the two-dimensional velocity distributions of ions and fast neutrals using the Boltzmann equation

Physics & Astronomy

• anisotropy 28%
• central processing units 45%
• collisions 29%
• cross sections 26%
• current density 32%
• electric potential 24%
• electrodes 27%
• energetic particles 100%
• etching 67%
• glow discharges 45%
• interactions 17%
• ion currents 45%
• ions 42%
• profiles 48%
• sheaths 92%
• simulation 17%
• vapor phases 71%
• velocity distribution 70%