Modification of sol-gel thin films by ion implantation

Engineering & Materials Science

• Absorption spectra 43%
• Densification 16%
• Drying 14%
• Fused silica 20%
• Ion implantation 100%
• Ions 27%
• Physical properties 13%
• Refractive index 38%
• Silicon wafers 17%
• Sol-gels 96%
• Thin films 69%

Physics & Astronomy

• absorption spectra 21%
• densification 14%
• drying 14%
• gels 57%
• implantation 52%
• ion implantation 67%
• ions 13%
• physical properties 11%
• refractivity 20%
• silica glass 16%
• silicon 7%
• thin films 38%
• wafers 11%

Chemical Compounds

• Densification 16%
• Glass 10%
• Ion 11%
• Ion Implantation 90%
• IR Absorption 35%
• Liquid Film 35%
• Modification 41%
• Refractive Index 28%