Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers

Hidekuni Takao, Yoshinori Matsumoto, Makoto Ishida

研究成果: Paper査読

12 被引用数 (Scopus)

抄録

A CMOS integrated three axial accelerometer based on a novel detection approach is presented. Applied acceleration is translated to voltage signal with 'stress sensitive differential amplifier' (SSDA). Outputs of X, Y and Z axis SSDAs are selected by a 3-ch analog multiplexer, and are amplified by a fully differential amplifier. The chopper stabilization technique was applied to them in order to improve the signal to noise ratio of the total system. The 192mV/G of Z axis, and 23mV/G of X and Y axis overall sensitivity were obtained. A time division multiplex technique which makes it possible to detect three components at the same time, can be realized with the accelerometer, if sample and hold circuits and additional signal processing circuits are combined with the accelerometer.

本文言語English
ページ1173-1176
ページ数4
出版ステータスPublished - 1997 1 1
外部発表はい
イベントProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
継続期間: 1997 6 161997 6 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • Engineering(all)

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