Monosilane Adsorption on Porous Alumina

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Adsorption of monosilane on porous adsorbents consisting of γ-alumina, alumina-silica, and silica was investigated. The maximum adsorption capacity was observed for alumina adsorbents with drying in nitrogen at ~ 100°C. Thus, monosilane is deduced to react with hydroxyl groups on γ-alumina surface, although physically adsorbed water interferes with the reaction. On the other hand, hydroxyl groups on silica were inactive for monosilane. The difference in the reactivity of hydroxyl groups with monosilane is ascribed to the basicity of the oxides.

本文言語English
ページ(範囲)3202-3204
ページ数3
ジャーナルJournal of the Electrochemical Society
142
9
DOI
出版ステータスPublished - 1995

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 再生可能エネルギー、持続可能性、環境
  • 表面、皮膜および薄膜
  • 電気化学
  • 材料化学

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