抄録
Adsorption of monosilane on porous adsorbents consisting of γ-alumina, alumina-silica, and silica was investigated. The maximum adsorption capacity was observed for alumina adsorbents with drying in nitrogen at ~ 100°C. Thus, monosilane is deduced to react with hydroxyl groups on γ-alumina surface, although physically adsorbed water interferes with the reaction. On the other hand, hydroxyl groups on silica were inactive for monosilane. The difference in the reactivity of hydroxyl groups with monosilane is ascribed to the basicity of the oxides.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 3202-3204 |
| ページ数 | 3 |
| ジャーナル | Journal of the Electrochemical Society |
| 巻 | 142 |
| 号 | 9 |
| DOI | |
| 出版ステータス | Published - 1995 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 再生可能エネルギー、持続可能性、環境
- 表面、皮膜および薄膜
- 電気化学
- 材料化学
UN SDG
この成果は、次の持続可能な開発目標に貢献しています
