Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

研究成果: Conference contribution

抄録

This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.

本文言語English
ホスト出版物のタイトル35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版社IEEE Computer Society
ページ688-690
ページ数3
ISBN(電子版)9781665409117
DOI
出版ステータスPublished - 2022
イベント35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
継続期間: 2022 1月 92022 1月 13

出版物シリーズ

名前IEEE Symposium on Mass Storage Systems and Technologies
2022-January
ISSN(印刷版)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
国/地域Japan
CityTokyo
Period22/1/922/1/13

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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