Multi-DOF ultrasonic motor using single-phase-driven vibrators

研究成果: Article査読

7 被引用数 (Scopus)


This paper presents a novel multi-degree-of-freedom ultrasonic actuator. Miniaturization and precise positioning of transfer mechanisms are required, as industrial components are miniaturized. Therefore, many kinds of linear motors and X-Y stages using ultrasonic motors have been developed because of their great characteristics suitable for precise positioning. However, these are still not small enough and the moving range of an object is limited. In order to overcome these problems, we propose a multi-degree-of-freedom actuator using plural single-phase-driven ultrasonic vibrators. This actuator composed of several small-scale vibrators arranged in an array, each of them can generate orthogonal four-direction trust. By combining the thrust generated at each vibrator, we can obtain multiple movements of object. At first in this paper, we propose a driving principle of the actuator. Next, we design and manufacture the vibrator. Finally, we measured vibrating characteristics of vibrator we produced, and driving characteristics of the actuator.

ジャーナルNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
出版ステータスPublished - 2007 2月

ASJC Scopus subject areas

  • 材料力学
  • 機械工学
  • 産業および生産工学


「Multi-DOF ultrasonic motor using single-phase-driven vibrators」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。