Nano-precision fabrication of hexagonal microlens array by segment turning using slow tool servo

Mao Mukaida, Jiwang Yan

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.

本文言語English
ホスト出版物のタイトルProceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
出版社euspen
ページ339-340
ページ数2
ISBN(印刷版)9780956679079
出版ステータスPublished - 2015
イベント15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 - Leuven, Belgium
継続期間: 2015 6 12015 6 5

Other

Other15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
国/地域Belgium
CityLeuven
Period15/6/115/6/5

ASJC Scopus subject areas

  • 材料科学(全般)
  • 産業および生産工学
  • 機械工学
  • 器械工学
  • 環境工学

フィンガープリント

「Nano-precision fabrication of hexagonal microlens array by segment turning using slow tool servo」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル