Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.
|ホスト出版物のタイトル||Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015|
|出版ステータス||Published - 2015|
|イベント||15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 - Leuven, Belgium|
継続期間: 2015 6 1 → 2015 6 5
|Other||15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015|
|Period||15/6/1 → 15/6/5|
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