Nanofabrication of high throughput 30 nm hole 2D arrays by a simple visible laser ablation technique

Kazushi Yamada, Chieko Narita, Ramanujam Kumaresan, Takuya Shinohara, Mitsuhiro Terakawa, Yasuyuki Tsuboi

研究成果: Article査読

6 被引用数 (Scopus)

抄録

In this paper, we demonstrate two-dimensional nanohole array substrates prepared using the visible laser ablation technique. We fabricated Au/polymer hybrid thin films where the Au nanoparticles were fixed onto the block copolymer substrate, which was used as the microphase-separated structure. The film was coated with a thin layer of poly(methyl acrylate), and was then irradiated with a nanosecond 532 nm pulsed laser light. The light excited the resonant plasmon absorption band of the Au nanoparticles. The nanoparticles underwent explosive vaporization via a superheated state, resulting in the formation of two-dimensional nanohole arrays on the film surface. The relevant mechanism aspects of the nanohole formation process and the relationship with laser fluence are presented.

本文言語English
ページ(範囲)868-872
ページ数5
ジャーナルApplied Surface Science
420
DOI
出版ステータスPublished - 2017 10 31

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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