TY - GEN
T1 - Nanometric cutting of single crystal silicon for large-diameter aspheric optical element
AU - Yan, Jiwang
AU - Tamaki, Jun'ichi
AU - Syoji, Katsuo
AU - Kuriyagawa, Tsunemoto
PY - 2002/12/1
Y1 - 2002/12/1
N2 - A new method for diamond turning aspheric surfaces on hard brittle materials, termed the straight-line enveloping method (SLEM), is proposed. In this method, the aspheric surface is generated using a straight-nosed diamond tool on a three-axis simultaneous control ultra-precision machine tool. This tool geometry enables thinning of the chip in the nanometric range at the same time provides significant width to undeformed chip thickness ratio to ensure plane strain conditions. The cutting experiment of a large single crystal silicon aspheric lens is described. It is demonstrated that the proposed method significantly improves machining efficiency, accuracy and lowers tool wear.
AB - A new method for diamond turning aspheric surfaces on hard brittle materials, termed the straight-line enveloping method (SLEM), is proposed. In this method, the aspheric surface is generated using a straight-nosed diamond tool on a three-axis simultaneous control ultra-precision machine tool. This tool geometry enables thinning of the chip in the nanometric range at the same time provides significant width to undeformed chip thickness ratio to ensure plane strain conditions. The cutting experiment of a large single crystal silicon aspheric lens is described. It is demonstrated that the proposed method significantly improves machining efficiency, accuracy and lowers tool wear.
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M3 - Conference contribution
AN - SCOPUS:0141428776
SN - 0958069212
SN - 9780958069212
T3 - Proceedings of the 5th International Conference on Frontiers of Design and Manufacturing (ICFDM'2002)
SP - 25
EP - 28
BT - Proceedings of the 5th International Conference on Frontiers of Design and Manufacturing (ICFDM'2002)
A2 - Guo, D.
A2 - Wang, D.
A2 - Jia, Z.
A2 - Wang, J.
A2 - Guo, D.
A2 - Wang, D.
A2 - Jia, Z.
A2 - Wang, J.
T2 - Proceedings of the 5th International Conference on Frontiers of Design and Manufacturing (ICFDM'2002)
Y2 - 10 July 2002 through 12 July 2002
ER -