Nanoparticle generation from various types of silicon materials by nanosecond-pulsed laser irradiation

Ko Momoki, Jiwang Yan

研究成果: Article査読

2 被引用数 (Scopus)

抄録

A huge amount of silicon sludge is disposed of from silicon wafer manufacture, and its reuse is a critical issue. In this study, silicon nanoparticle generation from sludge was explored by nanosecond-pulsed laser irradiation. The nanoparticle production efficiency from silicon sludge was compared with that from silicon wafers. The result showed that using silicon sludge as a laser irradiation target leads to a distinctly higher production efficiency of nanoparticles; the smaller the powder size of the silicon sludge, the higher the efficiency. The generated silicon nanoparticles were crystalline with sizes at the 10 nm level.

本文言語English
論文番号026505
ジャーナルApplied Physics Express
13
2
DOI
出版ステータスPublished - 2020 2 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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