Needle Type Pressure Sensor with Parylene Membrane and Silicone Oil Inside

Takuto Kishimoto, Hidetoshi Takahashi

研究成果: Conference contribution

抄録

This study presents a pressure sensor that can measure the pressure inside the human body. In the medical field, many pressure sensors have been developed for therapeutic applications. However, these pressure sensors require the whole sensor body to be put into the inside of the patient via surgical operations so that the measurement physically burdens patients. Here, we propose a needle-type pressure sensor with a built-in piezoresistive cantilever. The proposed sensor has a needle part with a thin membrane on the tip and is filled with incompressible liquid inside. By ply inserting a needle part into a target, we can measure the body fluid pressure with minimal invasiveness. The resistance of the built-in piezoresistive cantilever varies according to the pressure change applied to the needle tip. Because the fabricated sensor responded to pseudo body pressure, it was suggested that the fabricated needle-type pressure sensor could detect pressure change inside the body.

本文言語English
ホスト出版物のタイトル35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版社IEEE Computer Society
ページ668-671
ページ数4
ISBN(電子版)9781665409117
DOI
出版ステータスPublished - 2022
イベント35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
継続期間: 2022 1月 92022 1月 13

出版物シリーズ

名前IEEE Symposium on Mass Storage Systems and Technologies
2022-January
ISSN(印刷版)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
国/地域Japan
CityTokyo
Period22/1/922/1/13

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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