Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage

Hikaru Takamatsu, Toshihiko Sugiura

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.

本文言語English
ホスト出版物のタイトルProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
ページ423-424
ページ数2
DOI
出版ステータスPublished - 2005 12 1
イベント2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada
継続期間: 2006 7 242006 7 27

出版物シリーズ

名前Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Other

Other2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
国/地域Canada
CityBanff, Alberta
Period06/7/2406/7/27

ASJC Scopus subject areas

  • 工学(全般)

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