Numerical analysis of ion dynamics in RF ICP discharge

K. Nishida, S. Mattei, W. Kobayashi, J. Lettry, A. Hatayama

研究成果: Conference contribution

抄録

We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.

本文言語English
ホスト出版物のタイトルProceedings of the 17th International Conference on Ion Sources
編集者Edgar Mahner, Richard Scrivens, Richard Pardo, Jacques Lettry, Bruce Marsh
出版社American Institute of Physics Inc.
ISBN(印刷版)9780735417274
DOI
出版ステータスPublished - 2018 9 21
イベント17th International Conference on Ion Sources 2018 - Geneva, Switzerland
継続期間: 2017 9 152017 9 20

出版物シリーズ

名前AIP Conference Proceedings
2011
ISSN(印刷版)0094-243X
ISSN(電子版)1551-7616

Other

Other17th International Conference on Ion Sources 2018
CountrySwitzerland
CityGeneva
Period17/9/1517/9/20

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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