Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

T. Aoyama, K. Koizumi, Y. Kakinuma, Y. Kobayashi

研究成果: Article査読

21 被引用数 (Scopus)

抄録

Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.

本文言語English
ページ(範囲)367-370
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
58
1
DOI
出版ステータスPublished - 2009 4 10

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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