抄録
Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 367-370 |
| ページ数 | 4 |
| ジャーナル | CIRP Annals - Manufacturing Technology |
| 巻 | 58 |
| 号 | 1 |
| DOI | |
| 出版ステータス | Published - 2009 4月 10 |
ASJC Scopus subject areas
- 機械工学
- 産業および生産工学