Numerical modeling of RF magnetron sputtering with metallic or dielectric target

T. Makabe, T. Yagisawa

研究成果: Conference contribution

抄録

A self-consistent modeling of two-dimensional and temporal (2D-t) structures of RF magnetron plasma with a metallic (copper) and a dielectric (SiO2) target is performed at 5 mTorr in argon by using plasma hybrid model consisting of a particle-in-cell/Monte Carlo (PIC/MC) simulation for electrons and the relaxation continuum (RCT) model for ions. The erosion profiles of both targets are numerically predicted through the flux velocity distribution of ions incident on the surface. The mechanism of plasma maintenance in a dielectric target is quite different from that in a metallic one. Two major differences exist in an erosion profile between both targets. One is the presence of dual peaks in the erosion profile of the dielectric target. The other is the discrepancy in the position of the maxima between incident ion flux and erosion depth on the dielectric target. These are direct influences of the radially localized structure in an interfacial sheath based on the charge accumulation on a dielectric surface.

本文言語English
ホスト出版物のタイトルResearch Trends in Contemporary Materials Science - YUCOMAT VIII - Selected papers presented at the 8th Conference of the Yugoslav Materials Research Society
出版社Trans Tech Publications Ltd
ページ65-71
ページ数7
ISBN(印刷版)0878494413, 9780878494415
DOI
出版ステータスPublished - 2007 1 1
イベント8th Conference of the Yugoslav Materials Research Society - Herceg Novi, Serbia
継続期間: 2006 9 42006 9 8

出版物シリーズ

名前Materials Science Forum
555
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

Other

Other8th Conference of the Yugoslav Materials Research Society
国/地域Serbia
CityHerceg Novi
Period06/9/406/9/8

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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