On the behavior of interaction of a Pt-related center with radiation-induced defects and the trace platinum detection

Y. M. Weng, E. Ohta, M. Sakata

研究成果: Article査読

10 被引用数 (Scopus)

抄録

The interaction of platinum (Pt) with electron irradiation-induced defects has been observed. Platinum in silicon increases irradiation-induced defects remarkably, especially the A center, and lowers the annealing temperature to 220°C for the A center and to 140°C for the divacancy and E center. The level Ea (0.23) in the Pt-doped silicon is the Pt(-/0) level, an acceptor like the A center. A method is suggested for activating the platinum in silicon with low-energy electron irradiation and subsequent thermal annealing and detecting it by deep level transient spectroscopy (DLTS).

本文言語English
ページ(範囲)515-518
ページ数4
ジャーナルJournal of Applied Physics
65
2
DOI
出版ステータスPublished - 1989
外部発表はい

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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