One-side-electrode-type fluid-based inclinometer combined with CMOS circuitry

Asrulnizam Bin Abd Manaf, Kazumasa Nakamura, Junpei Onishi, Yoshinori Matsumoto

研究成果: Conference contribution

7 被引用数 (Scopus)

抄録

In this study, electrical double layer theory is applied to realize one-side-electrode-type fluid-based inclinometer combined with CMOS circuitry. Charge-balanced capacitance-voltage conversion (C-V converter) circuit was designed as detection circuit and it was fabricated using 0.35 μm CMOS process. The sensor design and substrate penetration lithography method are demonstrated in sensor fabrication, and experiment to find a proper fluid for this application was implemented.

本文言語English
ホスト出版物のタイトルThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
ページ844-847
ページ数4
DOI
出版ステータスPublished - 2007 12 1
イベント6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
継続期間: 2007 10 282007 10 31

出版物シリーズ

名前Proceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
国/地域United States
CityAtlanta, GA
Period07/10/2807/10/31

ASJC Scopus subject areas

  • 電子工学および電気工学

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