Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures

Y. Miyoshi, Zoran Lj Petrović, Toshiaki Makabe

研究成果: Article査読

52 被引用数 (Scopus)

抄録

We have applied optical emission spectroscopy together with computerized tomography (CT) to study the transition between E and H modes in inductively coupled plasma. Measurements were performed in pure Ar and in CF4(5%)/Ar mixture in the pressure range between 5 and 300 m Torr. It was found that the radial and azimuthal CT images of the E (capacitively coupled) mode are quite different from those of the H (inductively coupled) mode. The E mode structures show clearly the presence of capacitive coupling, while the structure of the H mode corresponds to that of the predicted induced fields. The differences diminish at low pressures due to the non-local transport of electrons. The contributions of direct and stepwise excitation are separated by using two different energy levels, 2p1 and 2p9, of Ar. In addition, the measurements obtained in electronegative gas mixture with large losses of electrons of moderate and small energy show more clearly the kinetics of excitation in the two modes and the regions where high-energy electrons are produced.

本文言語English
ページ(範囲)454-461
ページ数8
ジャーナルJournal of Physics D: Applied Physics
35
5
DOI
出版ステータスPublished - 2002 3 7

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜

フィンガープリント

「Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF<sub>4</sub> mixtures」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル