Optimization of grinding conditions utilizing nano-topography distribution analysis

Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

研究成果: Paper

抜粋

Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.

元の言語English
出版物ステータスPublished - 2009 12 1
外部発表Yes
イベント5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
継続期間: 2009 12 22009 12 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Japan
Osaka
期間09/12/209/12/4

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • これを引用

    Yoshihara, N., Yan, J., & Kuriyagawa, T. (2009). Optimization of grinding conditions utilizing nano-topography distribution analysis. 論文発表場所 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.