Optimization of grinding conditions utilizing nano-topography distribution analysis

Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

研究成果: Conference contribution

抄録

Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.

元の言語English
ホスト出版物のタイトルProceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
出版物ステータスPublished - 2009
外部発表Yes
イベント5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
継続期間: 2009 12 22009 12 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Japan
Osaka
期間09/12/209/12/4

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ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

これを引用

Yoshihara, N., Yan, J., & Kuriyagawa, T. (2009). Optimization of grinding conditions utilizing nano-topography distribution analysis. : Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009

Optimization of grinding conditions utilizing nano-topography distribution analysis. / Yoshihara, Nobuhito; Yan, Jiwang; Kuriyagawa, Tsunemoto.

Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009. 2009.

研究成果: Conference contribution

Yoshihara, N, Yan, J & Kuriyagawa, T 2009, Optimization of grinding conditions utilizing nano-topography distribution analysis. : Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009. 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan, 09/12/2.
Yoshihara N, Yan J, Kuriyagawa T. Optimization of grinding conditions utilizing nano-topography distribution analysis. : Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009. 2009
Yoshihara, Nobuhito ; Yan, Jiwang ; Kuriyagawa, Tsunemoto. / Optimization of grinding conditions utilizing nano-topography distribution analysis. Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009. 2009.
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abstract = "Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.",
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N2 - Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.

AB - Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.

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