Optimization of the feedback constant control for the mass-controlled layer-by-layer sequential adsorption technique for polyelectrolyte thin films

Yoshiki Okayama, Takahiro Ito, Seimei Shiratori

研究成果: Conference article査読

13 被引用数 (Scopus)

抄録

Mass-controlled layer-by-layer sequential adsorption process was newly developed for the fabrication of ultra-thin organic films formed by polyelectrolytes. A quartz crystal was attached to the arm of a robot and, using the quartz crystal microbalance (QCM) method, the frequency shifts during adsorption of the materials were monitored. By optimization of the feedback constant of the data acquired by QCM to the dipping time, high-quality self-assembled films were produced. From the cross-sectional images observed by TEM and thickness measurement carried out using an ellipsometer, it was found that the layer thickness was controlled with nm-scale accuracy.

本文言語English
ページ(範囲)132-137
ページ数6
ジャーナルThin Solid Films
393
1-2
DOI
出版ステータスPublished - 2001 8 1
イベント4th International Conference on Nano-Molecular Electronics - Kobe, Japan
継続期間: 2000 12 52000 12 7

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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