TY - JOUR
T1 - Possibility for rapid generation of high-pressure phases in single-crystal silicon by fast nanoindentation
AU - Huang, Hu
AU - Yan, Jiwang
N1 - Publisher Copyright:
� 2015 IOP Publishing Ltd.
PY - 2015/9/28
Y1 - 2015/9/28
N2 - High-pressure phases of silicon such as Si-XII/Si-III exhibit attractive optical, electrical and chemical properties, but until now, it has been technologically impossible to produce a significant quantity of Si-XII or Si-III. In this study, to explore the possibility of generating high-pressure silicon phases efficiently, comparative nanoindentation experiments were conducted. Effects of the loading rate, unloading rate and maximum indentation load were investigated, and key factors affecting the high-pressure phase formation were identified. A new nanoindentation protocol is proposed that introduces an intermediate holding stage into the unloading process. The resulting end phases under the indent were detected by a laser micro-Raman spectrometer and compared with those formed in conventional nanoindentation. The results indicate that high-pressure phases Si-XII and Si-III were successfully formed during the intermediate holding stage even with a very high loading/unloading rate. This finding demonstrates the possibility of rapid production of high-pressure phases of silicon through fast mechanical loading and unloading.
AB - High-pressure phases of silicon such as Si-XII/Si-III exhibit attractive optical, electrical and chemical properties, but until now, it has been technologically impossible to produce a significant quantity of Si-XII or Si-III. In this study, to explore the possibility of generating high-pressure silicon phases efficiently, comparative nanoindentation experiments were conducted. Effects of the loading rate, unloading rate and maximum indentation load were investigated, and key factors affecting the high-pressure phase formation were identified. A new nanoindentation protocol is proposed that introduces an intermediate holding stage into the unloading process. The resulting end phases under the indent were detected by a laser micro-Raman spectrometer and compared with those formed in conventional nanoindentation. The results indicate that high-pressure phases Si-XII and Si-III were successfully formed during the intermediate holding stage even with a very high loading/unloading rate. This finding demonstrates the possibility of rapid production of high-pressure phases of silicon through fast mechanical loading and unloading.
KW - high-pressure phase
KW - load control
KW - nanoindentation
KW - phase transformation
KW - single-crystal silicon
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U2 - 10.1088/0268-1242/30/11/115001
DO - 10.1088/0268-1242/30/11/115001
M3 - Article
AN - SCOPUS:84945948898
SN - 0268-1242
VL - 30
JO - Semiconductor Science and Technology
JF - Semiconductor Science and Technology
IS - 11
M1 - 115001
ER -