TY - JOUR
T1 - Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels
AU - Mishima, Koji
AU - Kakinuma, Yasuhiro
AU - Aoyama, Tojiro
PY - 2010
Y1 - 2010
N2 - Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.
AB - Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.
KW - 3D shaped channel
KW - Cryogenic micromachining
KW - Microfluidic chip-TAS
KW - PDMS
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U2 - 10.1299/jamdsm.4.936
DO - 10.1299/jamdsm.4.936
M3 - Article
AN - SCOPUS:80051953493
VL - 4
SP - 936
EP - 947
JO - Journal of Advanced Mechanical Design, Systems and Manufacturing
JF - Journal of Advanced Mechanical Design, Systems and Manufacturing
SN - 1881-3054
IS - 5
ER -