Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

研究成果: Article査読

9 被引用数 (Scopus)

抄録

Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

本文言語English
ページ(範囲)936-947
ページ数12
ジャーナルJournal of Advanced Mechanical Design, Systems and Manufacturing
4
5
DOI
出版ステータスPublished - 2010

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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