Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Koji Mishima, Masaomi Yamamoto, Yasuhiro Kakinuma, Tojiro Aoyama

研究成果: Paper査読

抄録

Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

本文言語English
出版ステータスPublished - 2009
イベント5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
継続期間: 2009 12 22009 12 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
国/地域Japan
CityOsaka
Period09/12/209/12/4

ASJC Scopus subject areas

  • 産業および生産工学

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