Properties of amorphous carbon films synthesized by atmospheric pressure glow plasma CVD method

Hideyuki Kodama, Satoshi Iizumi, Masaki Nakaya, Akira Shirakura, Atsushi Hotta, Tetsuya Suzuki

研究成果: Article査読

8 被引用数 (Scopus)

抄録

Amorphous carbon films were synthesized on top of polyethylene terephthalate (PET) substrates using atmospheric-pressure glow (APG) plasma CVD equipment which we originally designed and set up. Plasma was generated between two metal electrodes one of which was covered with a dielectric plate. By varying dielectric constant of the plate, the deposition rate of the carbon films was controlled. From the oxygen transmission test, the resulting PET coated with thin carbon films exhibited high gas barrier property. Using the material with high dielectric constant, we finally synthesized a nearly complete gas barrier films at the deposition rate of 15 sec.

本文言語English
ページ(範囲)673-678
ページ数6
ジャーナルJournal of Photopolymer Science and Technology
19
5
DOI
出版ステータスPublished - 2006

ASJC Scopus subject areas

  • ポリマーおよびプラスチック
  • 有機化学
  • 材料化学

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