Quad-axial piezoresistive force sensor probe by four sensing elements with sidewall doping method

Hidetoshi Takahashi, S. Hirakawa, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

This paper reports a quad-axial force sensor probe which can measure tri-axial forces and one torque around the probe. By forming piezoresistors three dimensionally on the probe supporting beams, four sensing element can detect quad-axial force/torque on the probe tip. We demonstrated that the fabricated sensor had condition number of 2.6 with force resolutions under 1.0 μN and torque resolution under 1.0 nNm.

本文言語English
ホスト出版物のタイトル2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1089-1092
ページ数4
ISBN(電子版)9781479989553
DOI
出版ステータスPublished - 2015 8 5
外部発表はい
イベント18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
継続期間: 2015 6 212015 6 25

出版物シリーズ

名前2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period15/6/2115/6/25

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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