Radiofrequency electron swarm transport in reactive gases and plasmas

K. Maeda, T. Makabe

研究成果: Article

30 引用 (Scopus)

抜粋

This paper gives a historical review of the development of radiofrequency (RF) electron swarm from a theoretical point of view. Also the recent progress of the direct numerical procedure (DNP) for solving the Boltzmann equation will be discussed with some typical examples of the temporally modulated velocity distribution in Ar and HCl in an RF field. The significance of DNP will be demonstrated for an RF swarm in the frequency range from MHz to GHz at strong fields.

元の言語English
ページ(範囲)61-69
ページ数9
ジャーナルPhysica Scripta
1994
発行部数T53
DOI
出版物ステータスPublished - 1994 1 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Mathematical Physics
  • Condensed Matter Physics

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