Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Olav Solgaard

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

元の言語English
ホスト出版物のタイトルMOEMS and Miniaturized Systems VI
DOI
出版物ステータスPublished - 2007 4 30
外部発表Yes
イベントMOEMS and Miniaturized Systems VI - San Jose, CA, United States
継続期間: 2007 1 242007 1 25

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6466
ISSN(印刷物)0277-786X

Other

OtherMOEMS and Miniaturized Systems VI
United States
San Jose, CA
期間07/1/2407/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

フィンガープリント Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Ra, H., Piyawattanametha, W., Taguchi, Y., & Solgaard, O. (2007). Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope. : MOEMS and Miniaturized Systems VI [64660G] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6466). https://doi.org/10.1117/12.711560