Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Olav Solgaard

研究成果: Conference contribution

1 被引用数 (Scopus)


This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

ホスト出版物のタイトルMOEMS and Miniaturized Systems VI
出版ステータスPublished - 2007 4月 30
イベントMOEMS and Miniaturized Systems VI - San Jose, CA, United States
継続期間: 2007 1月 242007 1月 25


名前Proceedings of SPIE - The International Society for Optical Engineering


OtherMOEMS and Miniaturized Systems VI
国/地域United States
CitySan Jose, CA

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


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