TY - GEN
T1 - Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope
AU - Ra, Hyejun
AU - Piyawattanametha, Wibool
AU - Taguchi, Yoshihiro
AU - Solgaard, Olav
PY - 2007/4/30
Y1 - 2007/4/30
N2 - This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.
AB - This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.
KW - Dual-axes confocal microscopy
KW - Electrostatic actuation
KW - Micromirror
KW - Scanning confocal microscopy
KW - Self-alignment
KW - Two-dimensional (2-D) MEMS scanner
KW - Vertical comb actuators
UR - http://www.scopus.com/inward/record.url?scp=34247327849&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247327849&partnerID=8YFLogxK
U2 - 10.1117/12.711560
DO - 10.1117/12.711560
M3 - Conference contribution
AN - SCOPUS:34247327849
SN - 0819465798
SN - 9780819465795
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems VI
T2 - MOEMS and Miniaturized Systems VI
Y2 - 24 January 2007 through 25 January 2007
ER -