Residual strain measurement of piezoelectric multilayers by spiral structure

Jun Hyub Park, Young Ryun Oh, Hyun Suk Nam, Yun Jae Kim, Tae Hyun Kim, Hee Yeoun Kim

研究成果: Article査読

2 被引用数 (Scopus)

抄録

A new structure is described to measure the residual strain of thin film of piezoelectric multi-layers. The spiral shaped structure consists of the four fixed-guided beams. Piezoelectric multilayers consisting of SiOx/Pt/PZT/Pt on SiNx substrate are used to evaluate the suggested structure. Finite element analysis predicts that the out-of-plane displacement of the spiral structure by residual stress depends linearly on the beam length, but there is little difference depending on the beam width. PZT is prepared by sol-gel method and multilayered spiral structures are released by microfabrication technique. Sensitivity analysis of the spiral structure with various layer stack shows that the high displacement of piezoelectric multilayers can be decreased by the application of SiOx layer with compressive stress over the piezoelectric multilayers.

本文言語English
ページ(範囲)2139-2142
ページ数4
ジャーナルJournal of Mechanical Science and Technology
26
7
DOI
出版ステータスPublished - 2012 7
外部発表はい

ASJC Scopus subject areas

  • 材料力学
  • 機械工学

フィンガープリント

「Residual strain measurement of piezoelectric multilayers by spiral structure」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル