Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa; Toshiaki Makabe; Takeshi Shibagaki; Nobuhiko Nakano; Zoran Lj Petrovic; Takeki Kogawa; Akihiko Itoh

doi:10.1143/jjap.35.1890

Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa, Toshiaki Makabe, Takeshi Shibagaki, Nobuhiko Nakano, Zoran Lj Petrovic, Takeki Kogawa, Akihiko Itoh

電気情報工学科

研究成果: Article › 査読

39 被引用数 (Scopus)

抄録

The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p₅) is discussed as functions of gas flow, gas pressure and power dissipation.

本文言語	English
ページ（範囲）	1890-1893
ページ数	4
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	35
号	3
DOI	https://doi.org/10.1143/jjap.35.1890
出版ステータス	Published - 1996 3月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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Robot assisted optical emission tomography in an inductively coupled plasma reactor. / Okigawa, Akifumi; Makabe, Toshiaki; Shibagaki, Takeshi; Nakano, Nobuhiko; Petrovic, Zoran Lj; Kogawa, Takeki; Itoh, Akihiko.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 35, No. 3, 03.1996, p. 1890-1893.

研究成果: Article › 査読

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Robot assisted optical emission tomography in an inductively coupled plasma reactor

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