Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa, Toshiaki Makabe, Takeshi Shibagaki, Nobuhiko Nakano, Zoran Lj Petrovic, Takeki Kogawa, Akihiko Itoh

研究成果: Article査読

39 被引用数 (Scopus)

抄録

The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

本文言語English
ページ(範囲)1890-1893
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
35
3
DOI
出版ステータスPublished - 1996 3月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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