Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa; Toshiaki Makabe; Takeshi Shibagaki; Nobuhiko Nakano; Zoran Lj Petrovic; Takeki Kogawa; Akihiko Itoh

doi:10.1143/jjap.35.1890

Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa, Toshiaki Makabe, Takeshi Shibagaki, Nobuhiko Nakano, Zoran Lj Petrovic, Takeki Kogawa, Akihiko Itoh

電気情報工学科

研究成果: Article › 査読

40 被引用数 (Scopus)

抄録

The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p₅) is discussed as functions of gas flow, gas pressure and power dissipation.

本文言語	English
ページ（範囲）	1890-1893
ページ数	4
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	35
号	3
DOI	https://doi.org/10.1143/jjap.35.1890
出版ステータス	Published - 1996 3月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/jjap.35.1890

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abstract = "The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.",

keywords = "Computered tomography, Inductively coupled plasma, Net excitation rate",

author = "Akifumi Okigawa and Toshiaki Makabe and Takeshi Shibagaki and Nobuhiko Nakano and Petrovic, {Zoran Lj} and Takeki Kogawa and Akihiko Itoh",

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AU - Okigawa, Akifumi

AU - Makabe, Toshiaki

AU - Shibagaki, Takeshi

AU - Nakano, Nobuhiko

AU - Petrovic, Zoran Lj

AU - Kogawa, Takeki

AU - Itoh, Akihiko

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N2 - The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

AB - The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

KW - Computered tomography

KW - Inductively coupled plasma

KW - Net excitation rate

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Robot assisted optical emission tomography in an inductively coupled plasma reactor

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