抄録
The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.
本文言語 | English |
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ページ(範囲) | 1890-1893 |
ページ数 | 4 |
ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
巻 | 35 |
号 | 3 |
DOI | |
出版ステータス | Published - 1996 3月 |
ASJC Scopus subject areas
- 工学(全般)
- 物理学および天文学(全般)