Sensing technology of micro tool edge position by using the total internal reflection of laser

Masaaki Nakazawa, Yasuhiro Kakinuma, Tojiro Aoyama

研究成果: Conference contribution

抄録

Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

元の言語English
ホスト出版物のタイトルLEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings
出版物ステータスPublished - 2007
イベント4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
継続期間: 2007 11 72007 11 9

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
Japan
Fukuoka
期間07/11/707/11/9

Fingerprint

Glass
Lasers
Micromachining
Laser beams

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

これを引用

Nakazawa, M., Kakinuma, Y., & Aoyama, T. (2007). Sensing technology of micro tool edge position by using the total internal reflection of laser. : LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings

Sensing technology of micro tool edge position by using the total internal reflection of laser. / Nakazawa, Masaaki; Kakinuma, Yasuhiro; Aoyama, Tojiro.

LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007.

研究成果: Conference contribution

Nakazawa, M, Kakinuma, Y & Aoyama, T 2007, Sensing technology of micro tool edge position by using the total internal reflection of laser. : LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007, Fukuoka, Japan, 07/11/7.
Nakazawa M, Kakinuma Y, Aoyama T. Sensing technology of micro tool edge position by using the total internal reflection of laser. : LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007
Nakazawa, Masaaki ; Kakinuma, Yasuhiro ; Aoyama, Tojiro. / Sensing technology of micro tool edge position by using the total internal reflection of laser. LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007.
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