Sensing technology of micro tool edge position by using the total internal reflection of laser

Masaaki Nakazawa, Yasuhiro Kakinuma, Tojiro Aoyama

研究成果: Paper査読

抄録

Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.

本文言語English
出版ステータスPublished - 2007 12 1
イベント4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
継続期間: 2007 11 72007 11 9

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
国/地域Japan
CityFukuoka
Period07/11/707/11/9

ASJC Scopus subject areas

  • 産業および生産工学

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