@inproceedings{193b85c523a44800ac4763bfd1b85a45,
title = "Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor",
abstract = "This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.",
keywords = "Distance sensor, Helmholtz resonator, Piezoresistive cantilever",
author = "A. Suzuki and H. Takahashi and E. Iwase and K. Matsumoto and I. Shimoyama",
year = "2009",
month = dec,
day = "11",
doi = "10.1109/SENSOR.2009.5285784",
language = "English",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "1557--1560",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}