Sensitivity enhancement of a cantilever-type airflow shear stress sensor via surface roughness modification

R. Kazama, Hidetoshi Takahashi, N. Thanh-Vinh, T. Takahata, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

抄録

This paper reports an airflow shear stress sensor whose sensitivity is enhanced by modifying the surface roughness. The sensor consists of a cantilever-typed shear stress sensor and a micro pillar array on the surface of the cantilever. Piezoresistors are formed on the side walls of the cantilever's hinges to detect the shear force acting on the cantilever. When a shear airflow is applied to the proposed sensor, the shear force is generated on the surface of not only the cantilever but also the micro pillar array. Therefore, for the same airflow velocity, the total shear force acting on the surface of the proposed sensor is larger than that acting on the surface of a sensor with a flat surface. The experimental results show that the micro pillar structure improves the sensor sensitivity in response to airflow by 5 times compared with the flat surface structure.

本文言語English
ホスト出版物のタイトルMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ839-842
ページ数4
ISBN(電子版)9781509019731
DOI
出版ステータスPublished - 2016 2 26
外部発表はい
イベント29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
継続期間: 2016 1 242016 1 28

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2016-February
ISSN(印刷版)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

フィンガープリント 「Sensitivity enhancement of a cantilever-type airflow shear stress sensor via surface roughness modification」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル