Simulation of Magnetron Plasma

Eiji Shidoji, Toshiaki Makabe

研究成果: Article › 査読

本文言語	English
ページ（範囲）	767-772
ページ数	6
ジャーナル	Shinku/Journal of the Vacuum Society of Japan
巻	43
号	8
DOI	https://doi.org/10.3131/jvsj.43.767
出版ステータス	Published - 2000 1月

ASJC Scopus subject areas

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