SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud; Yuta Ooka; Tomohisa Tabata; Tomohiro Tetsumoto; Takasumi Tanabe

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

研究成果: Conference contribution

抄録

We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

本文言語	English
ホスト出版物のタイトル	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
出版社	OSA - The Optical Society
巻	Part F122-CLEOPR 2017
ISBN（電子版）	9781557528209
出版ステータス	Published - 2017 1月 1
イベント	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore 継続期間: 2017 7月 31 → 2017 8月 4

Other

Other	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
国/地域	Singapore
City	Singapore
Period	17/7/31 → 17/8/4

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
材料力学

他のファイルとリンク

引用スタイル

Daud, NAB, Ooka, Y, Tabata, T, Tetsumoto, T & Tanabe, T 2017, SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. vol. Part F122-CLEOPR 2017, s2277, OSA - The Optical Society, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017, Singapore, Singapore, 17/7/31.

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abstract = "We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.",

keywords = "Components, Electro-optic devices, Integrated optics, Optical signal processing, Opto-electronics, Photonic crystal",

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AU - Daud, Nurul Ashikin Binti

AU - Ooka, Yuta

AU - Tabata, Tomohisa

AU - Tetsumoto, Tomohiro

AU - Tanabe, Takasumi

PY - 2017/1/1

Y1 - 2017/1/1

N2 - We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

AB - We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

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KW - Electro-optic devices

KW - Integrated optics

KW - Optical signal processing

KW - Opto-electronics

KW - Photonic crystal

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M3 - Conference contribution

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VL - Part F122-CLEOPR 2017

BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017

PB - OSA - The Optical Society

T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017

Y2 - 31 July 2017 through 4 August 2017

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