SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

    研究成果: Conference contribution

    抄録

    We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

    本文言語English
    ホスト出版物のタイトルConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
    出版社OSA - The Optical Society
    Part F122-CLEOPR 2017
    ISBN(電子版)9781557528209
    出版ステータスPublished - 2017 1月 1
    イベントConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore
    継続期間: 2017 7月 312017 8月 4

    Other

    OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
    国/地域Singapore
    CitySingapore
    Period17/7/3117/8/4

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 材料力学

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