Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma

Kenji Kondo, Hidehiko Kuroda, Toshiaki Makabe

研究成果: Article査読

24 被引用数 (Scopus)

抄録

The use of an inductively coupled plasma (ICP) in material processing reactors is of relatively recent origin. A new theoretical model has been developed, based on a relaxation continuum (RCT) model for a collision dominated ICP. The spatiotemporal behavior of the ICP is investigated at 0.3 Torr and 13.56 MHz in Ar under the influence of electric and magnetic fields. It is demonstrated that the plasma is mainly sustained near the wall sheath during the phase when the external magnetic field becomes weak. It is also shown that the dominant mechanism of the power deposition in the ICP is caused by the electron motion under an azimuthal electric field.

本文言語English
ページ(範囲)31-33
ページ数3
ジャーナルApplied Physics Letters
65
1
DOI
出版ステータスPublished - 1994 12 1

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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