Specimen size effect on elastic-plastic strength evaluation of interface between thin films

Chuantong Chen, Kozo Koiwa, Nobuyuki Shishido, Shoji Kamiya, Masaki Omiya, Hisashi Sato, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Takeshi Nokuo, Tadahiro Nagasawa

研究成果: Article査読

2 被引用数 (Scopus)

抄録

A specimen size effect on the adhesion strength of Cu/insulation layer interface was studied by means of a new elastic-plastic finite element simulation technique. By considering the influence of the plastic zone at the interface crack tip, the adhesion strength appeared almost independent of the specimen size. Since the Cu crystals were far smaller than the specimen dimensions and thus no significant difference should be expected in adhesion strength, it is speculated that an accurate estimation of the plastic zone is essential for micro-scale specimen evaluation.

本文言語English
ページ(範囲)371-381
ページ数11
ジャーナルEngineering Fracture Mechanics
131
DOI
出版ステータスPublished - 2014 12 1

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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