Spectroscopic study of correlation between RF plasma structure and particle dynamics

T. Makabe, T. Kitajima

研究成果: Conference article査読

抄録

In-situ monitoring both of spatiotemporal structure and of particle growth in radiofrequency discharges at 13.56 MHz, including a sputtered molecule as an initial source of particle dynamics, has been performed by experiments using the spatiotemporally resolved optical emission spectroscopy and Mie Scattering. We investigate two systems, i.e., sputtered (CF2)n in non-reactive Ar, and CHn in reactive CH4(5%)/Ar. The influence of growth and charging of particles on rf plasma structure is discussed. Also simple 1D-time resolved RF plasma structure with temporal particle growth by the Relaxation Continuum model is compared with experimental results.

本文言語English
ページ(範囲)43-49
ページ数7
ジャーナルInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
出版ステータスPublished - 1995
イベントProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
継続期間: 1995 4月 301995 5月 5

ASJC Scopus subject areas

  • 環境工学

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