In-situ monitoring both of spatiotemporal structure and of particle growth in radiofrequency discharges at 13.56 MHz, including a sputtered molecule as an initial source of particle dynamics, has been performed by experiments using the spatiotemporally resolved optical emission spectroscopy and Mie Scattering. We investigate two systems, i.e., sputtered (CF2)n in non-reactive Ar, and CHn in reactive CH4(5%)/Ar. The influence of growth and charging of particles on rf plasma structure is discussed. Also simple 1D-time resolved RF plasma structure with temporal particle growth by the Relaxation Continuum model is compared with experimental results.
|ジャーナル||Institute of Environmental Sciences - Proceedings, Annual Technical Meeting|
|出版ステータス||Published - 1995|
|イベント||Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA|
継続期間: 1995 4月 30 → 1995 5月 5
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