Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses

Takasumi Tanabe, Tatsuyoshi Okamoto, Fumihiko Kannari

研究成果: Article査読

抄録

We demonstrate a novel method of material processing to create flexible periodic structures using temporal pulse shaping of ultrashort laser pulses and spectral interferometry. This scheme is based on the idea that the interferometric fringe pattern at a Fourier spectral plane can be varied by programming temporal amplitude, relative phase and the interval of two collinearly incident pulses. Various periodical patterns are formed on a silicon surface located at the Fourier plane with laser ablation.

本文言語English
ページ(範囲)5594-5597
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
42
9 A
DOI
出版ステータスPublished - 2003 9

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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