Standard CMOS Process Integrated Silicon-Based Ultraviolet-Infrared Complementary Sensor

Takaya Sugiura, Hiroki Miura, Nobuhiko Nakano

研究成果: Article査読

抄録

This study proposes a new ultraviolet-infrared (UV-Ir) compatible sensor fabricated using the standard CMOS process. The concept is verified through a numerical simulation, wherein the standard CMOS process parameters used are evaluated. The proposed sensor is an extension of a previously proposed RGB sensor designed on the standard CMOS process, and calculating the current ratio enables the detection of UV with high sensitivity. In addition, the use of current rectification eliminates the short to middle wavelength region and leaves only the Ir region which is used for detection. High dynamic ranges of 160 dB are ensured for all UV, Ir and RGB which they are excellent for color sensing. Consequently, combined with the previously proposed RGB sensing, the new RGB+UV+Ir sensor is realized without any filters.

本文言語English
論文番号7844905
ジャーナルIEEE Photonics Journal
14
4
DOI
出版ステータスPublished - 2022 8月 1

ASJC Scopus subject areas

  • 原子分子物理学および光学
  • 電子工学および電気工学

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