Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS

Shuichiro Hayashi, Yasutaka Nakajima, Mitsuhiro Terakawa

    研究成果: Conference contribution

    抄録

    By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.

    本文言語English
    ホスト出版物のタイトルLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
    編集者Gediminas Raciukaitis, Carlos Molpeceres, Tetsuya Makimura
    出版社SPIE
    ISBN(電子版)9781510624528
    DOI
    出版ステータスPublished - 2019 1 1
    イベントLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019 - San Francisco, United States
    継続期間: 2019 2 42019 2 6

    出版物シリーズ

    名前Proceedings of SPIE - The International Society for Optical Engineering
    10905
    ISSN(印刷版)0277-786X
    ISSN(電子版)1996-756X

    Conference

    ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV 2019
    CountryUnited States
    CitySan Francisco
    Period19/2/419/2/6

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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