Structures of Velocity Distribution Functions and Transport Parameters of the Electron Swarm in Ch4 in a Dc Electric Field

Naohiko Shimura, Toshiaki Makabe

研究成果: Article査読

25 被引用数 (Scopus)

抄録

The structure of each term in the density gradient expansion of the velocity distribution function of an isolated electron swarm has been investigated in a dc field by a numerical analysis using a finite element Boltzmann equation method. The electron swarm parameters, including the dissociation rate in CH4, have been calculated over a wide range: 0.1 <E/N < 3000 Td.

本文言語English
ページ(範囲)751-760
ページ数10
ジャーナルJournal of Physics D: Applied Physics
25
5
DOI
出版ステータスPublished - 1992 5 14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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