Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo, Toshiaki Makabe, Shigeru Kakuta, Akira Suzuki

研究成果: Article査読

48 被引用数 (Scopus)

抄録

Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

本文言語English
ページ(範囲)2143-2150
ページ数8
ジャーナルJournal of Applied Physics
71
5
DOI
出版ステータスPublished - 1992

ASJC Scopus subject areas

  • 物理学および天文学(全般)

フィンガープリント

「Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル